Parylene Chemical Resistance
Resistance to Chemicals (Acids, Alkalis and Solvents)
Swelling
(Thickness
change,
%)
on
immersion
in
various
chemicals
for
10 -
16m
thickness
film.
(Typical
values
only)
|
|
Immersing condition
|
diX C
|
diX N
|
Typical Values
|
Epoxies
|
Urethanes
|
Hydrochloric acid 10 % |
75 / 120min
|
A
|
-0.28
|
A
|
+0.08
|
B C
|
C D
|
Sulfuric acid 10 % |
75 / 120min
|
A
|
-0.28
|
A
|
+0.07
|
A B
|
C D
|
Nitric acid 10 % |
75 / 120min
|
A
|
-0.28
|
A
|
+0.15
|
D
|
D
|
Hydrofluoric acid 10 % |
50 / 120min
|
A
|
+0.09
|
A
|
+0.37
|
B
|
D
|
NaOH solution 10 % |
75 / 120min
|
A
|
-0.28
|
A
|
+0.15
|
A B
|
B C
|
NH4OH solution 10 % |
75 / 120min
|
A
|
-0.38
|
A
|
+0.15
|
A
|
B C
|
Hydrogen peroxide water
|
50 / 120min
|
A
|
0.00
|
A
|
0.00
|
C D
|
C D
|
n-Octane |
75 / 120min
|
A
|
+0.28
|
A
|
+0.29
|
C
|
B
|
Toluene |
75 / 120min
|
A
|
+1.32
|
A
|
+0.30
|
C
|
C
|
Monochlorobenzene |
75 / 120min
|
A
|
+1.04
|
A
|
+0.37
|
D
|
|
Pyridine |
75 / 120min
|
A
|
+0.28
|
A
|
+0.29
|
D
|
C
|
2-Propanol (IPA) |
50 / 120min
|
A
|
0.00
|
A
|
+0.07
|
C
|
B
|
Acetone
|
50 / 120min
|
A
|
-0.09
|
A
|
+0.15
|
C D
|
C
|
|
A:
Excellent
resistance
B:
Good
resistance
C:
Possible
to
use
with
difficulty
D:
No
good
to
use
Typical
Values
of
Epoxies
and
Urethanes
are
not
tested
by
same
condition
but
reference
only.
|
|